Optical Profilometry - Revision history

Dnanji: Dnanji moved page Optical Profilometer to Optical Profilometry

2022-11-06T19:20:10Z

Dnanji moved page Optical Profilometer to Optical Profilometry

← Older revision		Revision as of 15:20, 6 November 2022
(No difference)

Rzhou95 at 02:58, 6 October 2021

2021-10-06T02:58:01Z

← Older revision		Revision as of 22:58, 5 October 2021
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	{\|class="infobox"		{\|class="infobox"
	!style="font-size:135%;text-align:center;" \| Profilm 3D Optical Profilometer		!style="font-size:135%;text-align:center;" \| Profilm 3D Optical Profilometer [https://sites.gatech.edu/mse-mill/sop/profilometer/ [SOP<nowiki>]</nowiki>]
	\|-		\|-
	\|[[File:Profilometer-052621.png\|center\|300px]]		\|[[File:Profilometer-052621.png\|center\|300px]]

Rzhou95 at 22:59, 17 July 2021

2021-07-17T22:59:33Z

← Older revision		Revision as of 18:59, 17 July 2021
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	\|-		\|-
	\|'''Objectives''': 10x, 20x, 50x		\|'''Objectives''': 10x, 20x, 50x
			\|-
			\|'''Field of View''': 2.0 x 1.7 mm (10x), 1.0 x 0.85 mm (20x), 0.4 x 0.34 mm (50x)
	\|-		\|-
	\|'''Surface Roughness Resolution''': 0.05μm		\|'''Surface Roughness Resolution''': 0.05μm
			\|-
			\|'''Stage XY range''': 100 mm x 100 mm
			\|-
			\|'''Z range''': 100 mm
			\|-
			\|'''Camera''': 2592 x 1944 (5 megapixels)
	\|}		\|}

Amarin32: /* White Light Interferometry */

2021-07-15T16:31:51Z

White Light Interferometry

← Older revision		Revision as of 12:31, 15 July 2021
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	=== Advantages ===		=== Advantages ===
	* Capable of measuring a wide field of view		* Capable of measuring a wide field of view: Measurement in sub-nanometer range is possible.
	** Measurement in sub-nanometer range is possible.		* Quick measurement: Approximately 20 seconds compared to much longer for a stylus profilometer.
	* Quick measurement
	** `Approximately 20 seconds compared to much longer for a stylus profilometer.

	=== Disadvantages ===		=== Disadvantages ===

	* No or limited angular characteristic		* No or limited angular characteristic
	* Use is limited on certain objects		* Use is limited on certain objects: White light interferometers can only measure when there is a good reflection. There, it does not support measurement capabilities on a wide variety of objects. Measurements may also not be possible when there is a significant difference between the light reflected from the reference mirror and light reflected from the measurement area. (White light interferometers handle mirrored surfaces well, but cannot measure spiky or bumpy samples or nonreflective parts.
	** White light interferometers can only measure when there is a good reflection. There, it does not support measurement capabilities on a wide variety of objects. Measurements may also not be possible when there is a significant difference between the light reflected from the reference mirror and light reflected from the measurement area. (White light interferometers handle mirrored surfaces well, but cannot measure spiky or bumpy samples or nonreflective parts.		* Requires tilt correction: Prior to measuring, sample tilt correction must be performed using a goniometric stage. Tilted samples can cause closely-spaced interference patters, which hinder measurement accuracy. Some white light interferometry systems are equipped with a tilt mechanism that automatically corrects the sample tilt.
	* Requires tilt correction		* Low resolution for XY stage measurements: The resolution for XY stage measurements are low due to the low number of sampling data sets (approximately 300,000). Some white light interferometry systems can scale up to use approximately 980,000 data sets.
	** Prior to measuring, sample tilt correction must be performed using a goniometric stage. Tilted samples can cause closely-spaced interference patters, which hinder measurement accuracy. Some white light interferometry systems are equipped with a tilt mechanism that automatically corrects the sample tilt.		* Sensitive to vibrations: Place of installation is limited due to the equipment’s high sensitivity to vibrations. Shock-absorbing tables are necessary for installation.
	* Low resolution for XY stage measurements
	** The resolution for XY stage measurements are low due to the low number of sampling data sets (approximately 300,000). Some white light interferometry systems can scale up to use approximately 980,000 data sets.
	* Sensitive to vibrations
	** Place of installation is limited due to the equipment’s high sensitivity to vibrations. Shock-absorbing tables are necessary for installation.

	== References ==		== References ==

Amarin32 at 15:47, 6 July 2021

2021-07-06T15:47:21Z

← Older revision		Revision as of 11:47, 6 July 2021
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	== Introduction ==		== Introduction ==
	Profilometry is a technique used to extract topographical data from a surface. This can be a single point, a line scan or even a full three dimensional scan. The purpose of profilometry is to get surface morphology, step heights and surface roughness. This can be done using a physical probe or by using light. Metrology is the science of measurement. How rough is the sample? How high are the features? How much of the area has voids or particles? What is the defect density? Answers to these questions are often quantified using profilometry. All profilometers consist of at least two parts – a detector and a sample stage. The detector is what determines where the points on the sample are and the sample stage is what holds the sample. In some systems, the sample stage moves to allow for measurement while in others the detector moves. There are also instruments where both the sample stage and detector move.		Profilometry is a technique used to extract topographical data from a surface. <ref Name="Nanoscience"> Optical Profilometry. Nanoscience Instruments. (2018, July 26). https://www.nanoscience.com/techniques/optical-profilometry/. </ref> This can be a single point, a line scan or even a full three dimensional scan. The purpose of profilometry is to get surface morphology, step heights and surface roughness. This can be done using a physical probe or by using light. Metrology is the science of measurement. How rough is the sample? How high are the features? How much of the area has voids or particles? What is the defect density? Answers to these questions are often quantified using profilometry. All profilometers consist of at least two parts – a detector and a sample stage. The detector is what determines where the points on the sample are and the sample stage is what holds the sample. In some systems, the sample stage moves to allow for measurement while in others the detector moves. There are also instruments where both the sample stage and detector move.

	== Principle ==		== Principle ==
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	== White Light Interferometry ==		== White Light Interferometry ==
	[[File:WLI2.PNG\|thumb\|500px\|Illustration of interference pattern on a sloped sample]]Light interference occurs when there is a difference in distance traveled by the light (light path) from the surface of a target object to a certain point; a white light interferometer uses this phenomenon to measure the surface roughness of a sample. The light emitted from the source (semiconductor laser, etc.) is separated into reference and measurement beams. While the reference beam is passed through the reference mirror through a half mirror, the measurement beam is reflected and guided to the sample surface. The passed beam is reflected by the reference mirror to the charge-coupled device (CCD) image sensor and forms an interference pattern. The other beam is reflected off the sample surface, passes the half mirror, and forms an image through the CCD image sensor. The white light interferometer is designed so that the optical path length from the CCD element to the reference mirror and that from the CCD element to the sample surface are the same. The asperity on the sample surface causes these path lengths to be unequal, which results in forming an interference pattern at the CCD element. The number of lines in the interference pattern is translated to peaks and troughs (heights) on the sample surface.		[[File:WLI2.PNG\|thumb\|500px\|Illustration of interference pattern on a sloped sample]]Light interference occurs when there is a difference in distance traveled by the light (light path) from the surface of a target object to a certain point; a white light interferometer uses this phenomenon to measure the surface roughness of a sample <ref Name="Keyence"> White Light Interferometers. White Light Interferometers \| Instruments Used For Roughness Measurements \| Introduction To Roughness \| KEYENCE America. (n.d.). https://www.keyence.com/ss/products/microscope/roughness/equipment/interferometers.jsp. </ref>. The light emitted from the source (semiconductor laser, etc.) is separated into reference and measurement beams. While the reference beam is passed through the reference mirror through a half mirror, the measurement beam is reflected and guided to the sample surface. The passed beam is reflected by the reference mirror to the charge-coupled device (CCD) image sensor and forms an interference pattern. The other beam is reflected off the sample surface, passes the half mirror, and forms an image through the CCD image sensor. The white light interferometer is designed so that the optical path length from the CCD element to the reference mirror and that from the CCD element to the sample surface are the same. The asperity on the sample surface causes these path lengths to be unequal, which results in forming an interference pattern at the CCD element. The number of lines in the interference pattern is translated to peaks and troughs (heights) on the sample surface.

	=== Advantages ===		=== Advantages ===
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	* Sensitive to vibrations		* Sensitive to vibrations
	** Place of installation is limited due to the equipment’s high sensitivity to vibrations. Shock-absorbing tables are necessary for installation.		** Place of installation is limited due to the equipment’s high sensitivity to vibrations. Shock-absorbing tables are necessary for installation.

			== References ==
			<references />

	[[Category:Equipment\|char]]		[[Category:Equipment\|char]]

Amarin32 at 15:21, 6 July 2021

2021-07-06T15:21:22Z

← Older revision		Revision as of 11:21, 6 July 2021
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	== Principle ==		== Principle ==
	[[File:SPdiagram.PNG\|thumb\|left\|500px]]		[[File:SPdiagram.PNG\|thumb\|left\|500px\|Schematic of a stylus profilometer]]

	=== Stylus Profilometry ===		=== Stylus Profilometry ===
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	=== Optical Profilometry ===		=== Optical Profilometry ===
	[[File:OPdiagram.PNG\|thumb\|left\|400px]]		[[File:OPdiagram.PNG\|thumb\|left\|400px\|Schematic of an interferometric profilometer]]
	Optical profilometry uses light instead of a physical probe. This can be done a number of ways. The key component to this technique is directing the light in a way that it can detect the surface in 3D. Examples include optical interference, using a confocal aperture, focus and phase detection, and projecting a pattern onto the optical image.		Optical profilometry uses light instead of a physical probe. This can be done a number of ways. The key component to this technique is directing the light in a way that it can detect the surface in 3D. Examples include optical interference, using a confocal aperture, focus and phase detection, and projecting a pattern onto the optical image.

	== White Light Interferometry ==		== White Light Interferometry ==
	[[File:~~WLI1~~.PNG\|thumb]]		[[File:WLI2.PNG\|thumb\|500px\|Illustration of interference pattern on a sloped sample]]Light interference occurs when there is a difference in distance traveled by the light (light path) from the surface of a target object to a certain point; a white light interferometer uses this phenomenon to measure the surface roughness of a sample. The light emitted from the source (semiconductor laser, etc.) is separated into reference and measurement beams. While the reference beam is passed through the reference mirror through a half mirror, the measurement beam is reflected and guided to the sample surface. The passed beam is reflected by the reference mirror to the charge-coupled device (CCD) image sensor and forms an interference pattern. The other beam is reflected off the sample surface, passes the half mirror, and forms an image through the CCD image sensor. The white light interferometer is designed so that the optical path length from the CCD element to the reference mirror and that from the CCD element to the sample surface are the same. The asperity on the sample surface causes these path lengths to be unequal, which results in forming an interference pattern at the CCD element. The number of lines in the interference pattern is translated to peaks and troughs (heights) on the sample surface.
	Light interference occurs when there is a difference in distance traveled by the light (light path) from the surface of a target object to a certain point; a white light interferometer uses this phenomenon to measure the surface roughness of a sample. The light emitted from the source (semiconductor laser, etc.) is separated into reference and measurement beams. While the reference beam is passed through the reference mirror through a half mirror, the measurement beam is reflected and guided to the sample surface. The passed beam is reflected by the reference mirror to the charge-coupled device (CCD) image sensor and forms an interference pattern. The other beam is reflected off the sample surface, passes the half mirror, and forms an image through the CCD image sensor. The white light interferometer is designed so that the optical path length from the CCD element to the reference mirror and that from the CCD element to the sample surface are the same. The asperity on the sample surface causes these path lengths to be unequal, which results in forming an interference pattern at the CCD element. The number of lines in the interference pattern is translated to peaks and troughs (heights) on the sample surface.

	=== Advantages ===		=== Advantages ===

	* Capable of measuring a wide field of view		* Capable of measuring a wide field of view
	** Measurement in sub-nanometer range is possible.		** Measurement in sub-nanometer range is possible.
Line 39:		Line 37:
	* No or limited angular characteristic		* No or limited angular characteristic
	* Use is limited on certain objects		* Use is limited on certain objects
	** ~~[[File:WLI2.PNG\|thumb\|500px]]~~White light interferometers can only measure when there is a good reflection. There, it does not support measurement capabilities on a wide variety of objects. Measurements may also not be possible when there is a significant difference between the light reflected from the reference mirror and light reflected from the measurement area. (White light interferometers handle mirrored surfaces well, but cannot measure spiky or bumpy samples or nonreflective parts.		** White light interferometers can only measure when there is a good reflection. There, it does not support measurement capabilities on a wide variety of objects. Measurements may also not be possible when there is a significant difference between the light reflected from the reference mirror and light reflected from the measurement area. (White light interferometers handle mirrored surfaces well, but cannot measure spiky or bumpy samples or nonreflective parts.
	* Requires tilt correction		* Requires tilt correction
	** Prior to measuring, sample tilt correction must be performed using a goniometric stage. Tilted samples can cause closely-spaced interference patters, which hinder measurement accuracy. Some white light interferometry systems are equipped with a tilt mechanism that automatically corrects the sample tilt.		** Prior to measuring, sample tilt correction must be performed using a goniometric stage. Tilted samples can cause closely-spaced interference patters, which hinder measurement accuracy. Some white light interferometry systems are equipped with a tilt mechanism that automatically corrects the sample tilt.

Amarin32 at 15:14, 6 July 2021

2021-07-06T15:14:03Z

← Older revision		Revision as of 11:14, 6 July 2021
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	== Principle ==		== Principle ==
	[[File:SPdiagram.PNG\|thumb]]		[[File:SPdiagram.PNG\|thumb\|left\|500px]]

	=== Stylus Profilometry ===		=== Stylus Profilometry ===
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	=== Optical Profilometry ===		=== Optical Profilometry ===
	[[File:OPdiagram.PNG\|thumb]]		[[File:OPdiagram.PNG\|thumb\|left\|400px]]
	Optical profilometry uses light instead of a physical probe. This can be done a number of ways. The key component to this technique is directing the light in a way that it can detect the surface in 3D. Examples include optical interference, using a confocal aperture, focus and phase detection, and projecting a pattern onto the optical image.		Optical profilometry uses light instead of a physical probe. This can be done a number of ways. The key component to this technique is directing the light in a way that it can detect the surface in 3D. Examples include optical interference, using a confocal aperture, focus and phase detection, and projecting a pattern onto the optical image.

Line 39:		Line 39:
	* No or limited angular characteristic		* No or limited angular characteristic
	* Use is limited on certain objects		* Use is limited on certain objects
	** [[File:WLI2.PNG\|thumb]]White light interferometers can only measure when there is a good reflection. There, it does not support measurement capabilities on a wide variety of objects. Measurements may also not be possible when there is a significant difference between the light reflected from the reference mirror and light reflected from the measurement area. (White light interferometers handle mirrored surfaces well, but cannot measure spiky or bumpy samples or nonreflective parts.		** [[File:WLI2.PNG\|thumb\|500px]]White light interferometers can only measure when there is a good reflection. There, it does not support measurement capabilities on a wide variety of objects. Measurements may also not be possible when there is a significant difference between the light reflected from the reference mirror and light reflected from the measurement area. (White light interferometers handle mirrored surfaces well, but cannot measure spiky or bumpy samples or nonreflective parts.
	* Requires tilt correction		* Requires tilt correction
	** Prior to measuring, sample tilt correction must be performed using a goniometric stage. Tilted samples can cause closely-spaced interference patters, which hinder measurement accuracy. Some white light interferometry systems are equipped with a tilt mechanism that automatically corrects the sample tilt.		** Prior to measuring, sample tilt correction must be performed using a goniometric stage. Tilted samples can cause closely-spaced interference patters, which hinder measurement accuracy. Some white light interferometry systems are equipped with a tilt mechanism that automatically corrects the sample tilt.

Amarin32 at 15:13, 6 July 2021

2021-07-06T15:13:02Z

← Older revision		Revision as of 11:13, 6 July 2021
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	== Principle ==		== Principle ==
			[[File:SPdiagram.PNG\|thumb]]

	=== Stylus Profilometry ===		=== Stylus Profilometry ===
Line 20:		Line 21:

	=== Optical Profilometry ===		=== Optical Profilometry ===
			[[File:OPdiagram.PNG\|thumb]]
	Optical profilometry uses light instead of a physical probe. This can be done a number of ways. The key component to this technique is directing the light in a way that it can detect the surface in 3D. Examples include optical interference, using a confocal aperture, focus and phase detection, and projecting a pattern onto the optical image.		Optical profilometry uses light instead of a physical probe. This can be done a number of ways. The key component to this technique is directing the light in a way that it can detect the surface in 3D. Examples include optical interference, using a confocal aperture, focus and phase detection, and projecting a pattern onto the optical image.

	== White Light Interferometry ==		== White Light Interferometry ==
			[[File:WLI1.PNG\|thumb]]
	Light interference occurs when there is a difference in distance traveled by the light (light path) from the surface of a target object to a certain point; a white light interferometer uses this phenomenon to measure the surface roughness of a sample. The light emitted from the source (semiconductor laser, etc.) is separated into reference and measurement beams. While the reference beam is passed through the reference mirror through a half mirror, the measurement beam is reflected and guided to the sample surface. The passed beam is reflected by the reference mirror to the charge-coupled device (CCD) image sensor and forms an interference pattern. The other beam is reflected off the sample surface, passes the half mirror, and forms an image through the CCD image sensor. The white light interferometer is designed so that the optical path length from the CCD element to the reference mirror and that from the CCD element to the sample surface are the same. The asperity on the sample surface causes these path lengths to be unequal, which results in forming an interference pattern at the CCD element. The number of lines in the interference pattern is translated to peaks and troughs (heights) on the sample surface.		Light interference occurs when there is a difference in distance traveled by the light (light path) from the surface of a target object to a certain point; a white light interferometer uses this phenomenon to measure the surface roughness of a sample. The light emitted from the source (semiconductor laser, etc.) is separated into reference and measurement beams. While the reference beam is passed through the reference mirror through a half mirror, the measurement beam is reflected and guided to the sample surface. The passed beam is reflected by the reference mirror to the charge-coupled device (CCD) image sensor and forms an interference pattern. The other beam is reflected off the sample surface, passes the half mirror, and forms an image through the CCD image sensor. The white light interferometer is designed so that the optical path length from the CCD element to the reference mirror and that from the CCD element to the sample surface are the same. The asperity on the sample surface causes these path lengths to be unequal, which results in forming an interference pattern at the CCD element. The number of lines in the interference pattern is translated to peaks and troughs (heights) on the sample surface.

Line 36:		Line 39:
	* No or limited angular characteristic		* No or limited angular characteristic
	* Use is limited on certain objects		* Use is limited on certain objects
	** White light interferometers can only measure when there is a good reflection. There, it does not support measurement capabilities on a wide variety of objects. Measurements may also not be possible when there is a significant difference between the light reflected from the reference mirror and light reflected from the measurement area. (White light interferometers handle mirrored surfaces well, but cannot measure spiky or bumpy samples or nonreflective parts.		** [[File:WLI2.PNG\|thumb]]White light interferometers can only measure when there is a good reflection. There, it does not support measurement capabilities on a wide variety of objects. Measurements may also not be possible when there is a significant difference between the light reflected from the reference mirror and light reflected from the measurement area. (White light interferometers handle mirrored surfaces well, but cannot measure spiky or bumpy samples or nonreflective parts.
	* Requires tilt correction		* Requires tilt correction
	** Prior to measuring, sample tilt correction must be performed using a goniometric stage. Tilted samples can cause closely-spaced interference patters, which hinder measurement accuracy. Some white light interferometry systems are equipped with a tilt mechanism that automatically corrects the sample tilt.		** Prior to measuring, sample tilt correction must be performed using a goniometric stage. Tilted samples can cause closely-spaced interference patters, which hinder measurement accuracy. Some white light interferometry systems are equipped with a tilt mechanism that automatically corrects the sample tilt.

Amarin32 at 14:29, 6 July 2021

2021-07-06T14:29:10Z

@@ Line 9: / Line 9: @@
 |}
-The Profilm 3D optical profilometer uses white light interferometry to measure surface profiles and roughness. There are currently 10x, 20x, and 50x objectives that can resolve surface roughness down to 0.05 μm.
+The Profilm 3D optical profilometer uses white light interferometry to measure surface profiles and roughness. It has 10x, 20x, and 50x objectives that can resolve surface roughness down to 0.05 μm.
 [[Category:Equipment|char]]

Rzhou95 at 01:40, 6 June 2021

2021-06-06T01:40:55Z

← Older revision		Revision as of 21:40, 5 June 2021
Line 11:		Line 11:
	The Profilm 3D optical profilometer uses white light interferometry to measure surface profiles and roughness. There are currently 10x, 20x, and 50x objectives that can resolve surface roughness down to 0.05 μm.		The Profilm 3D optical profilometer uses white light interferometry to measure surface profiles and roughness. There are currently 10x, 20x, and 50x objectives that can resolve surface roughness down to 0.05 μm.

	[[Category:Equipment]]		[[Category:Equipment\|char]]