Scanning Electron Microscopy: Difference between revisions

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|'''Detectors''': Secondary (SED) & Backscatter (BSD)
|'''Detectors''': Secondary (SED) & Backscatter (BSD)
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|'''Capabilities''': EDX, automated image mapping
|'''Capabilities''': EDS, automated image mapping
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|'''Sample Dimensions''': <3cm tall, no magnetic samples
|'''Sample Dimensions''': <3cm tall, no magnetic samples
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|'''Detectors''': Backscatter only
|'''Detectors''': Backscatter only
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|-
|'''Capabilities''': EDX
|'''Capabilities''': EDS
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|'''Sample Dimensions''': <2.5cm in diameter, <3cm tall, no magnetic samples
|'''Sample Dimensions''': <2.5cm in diameter, <3cm tall, no magnetic samples
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|}


A scanning electron microscope (SEM) uses an electron beam than scans across a sample, allowing for much higher magnifications compared to optical microscopy. The MILL currently owns two desktop SEM systems: the older Phenom ProX and the new PhenomXL G2 (acquired May 2021). Both SEMs have backscatter electron detectors (BSD) for imaging and energy-dispersive X-ray spectroscopy (EDX) systems for elemental identification. The new PhenomXL contains an additional secondary electron detector (SED), which gives the images it captures better depth of field.
A scanning electron microscope (SEM) uses an electron beam than scans across a sample, allowing for much higher magnifications compared to optical microscopy. The electrons are reflected off the sample (either elestically or ineleastically) and collected by a detector, yielding an image. The MILL currently owns two benchtop SEM systems: an older Phenom ProX and a new PhenomXL G2 (acquired May 2021). Both SEMs have backscattered electron detectors (BSD) for imaging and energy-dispersive X-ray spectroscopy (EDS) systems for elemental identification. The new PhenomXL contains an additional secondary electron detector (SED), which gives the images it captures better depth of field.
 
<!--==Theory==-->


==Theory==
===Electron Imaging===
===Detectors===
===EDS===
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==Phenom ProX SEM SOP==  
==Phenom ProX SEM SOP==  
The Phenom ProX Scanning Electron Microscope can take detailed images of samples. The maximum magnification is 40,000X to 100,000X and the device is capable of resolving features to <500 nm. Samples must be less than 2.5 cm in diameter and less than 3 cm tall.  Additionally, energy-dispersive x-ray spectroscopy (EDX) can be performed on samples for elemental detection through point, line, and area scans.
The Phenom ProX Scanning Electron Microscope can take detailed images of samples. The maximum magnification is 40,000X to 100,000X and the device is capable of resolving features to <500 nm. Samples must be less than 2.5 cm in diameter and less than 3 cm tall.  Additionally, energy-dispersive x-ray spectroscopy (EDX) can be performed on samples for elemental detection through point, line, and area scans.
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===Operating Principle===
===Operating Principle===
The SEM produces highly magnified images with a large depth of field. Samples placed within the SEM are scanned with a focused beam of electrons. The electrons are reflected off the sample and collected by a detector, yielding an image. Since heavier atoms will backscatter electrons more strongly than lighter atoms, elements of a higher atomic number will appear brighter. Through EDS, the x-rays emitted from the elements are detected and analyzed to form a prediction of the elemental composition of the sample, and line and map scans can be performed.
The SEM produces highly magnified images with a large depth of field. Samples placed within the SEM are scanned with a focused beam of electrons. Since heavier atoms will backscatter electrons more strongly than lighter atoms, elements of a higher atomic number will appear brighter. Through EDS, the x-rays emitted from the elements are detected and analyzed to form a prediction of the elemental composition of the sample, and line and map scans can be performed.


===Safety Procedures===
===Safety Procedures===
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#*Close the door to the SEM.
#*Close the door to the SEM.


For a video playlist with additional explanation of SEM operating procedures click [https://www.youtube.com/watch?v=F9jh7PNGqrw&amp;list=PLuUTDbf8_YeL-z748VN6SejPdOToEacvE&amp;index=2&amp;t=0s here]
For a video playlist with additional explanation of SEM operating procedures click [https://www.youtube.com/watch?v=F9jh7PNGqrw&amp;list=PLuUTDbf8_YeL-z748VN6SejPdOToEacvE&amp;index=2&amp;t=0s here]-->

Revision as of 14:00, 26 May 2021

PhenomXL G2 SEM
Magnification Range: 360x to 190,000x
Feature Resolution: <500 nm
Detectors: Secondary (SED) & Backscatter (BSD)
Capabilities: EDS, automated image mapping
Sample Dimensions: <3cm tall, no magnetic samples
Phenom ProX SEM
Magnification Range: 40,000x to 100,000x
Feature Resolution: <500 nm
Detectors: Backscatter only
Capabilities: EDS
Sample Dimensions: <2.5cm in diameter, <3cm tall, no magnetic samples

A scanning electron microscope (SEM) uses an electron beam than scans across a sample, allowing for much higher magnifications compared to optical microscopy. The electrons are reflected off the sample (either elestically or ineleastically) and collected by a detector, yielding an image. The MILL currently owns two benchtop SEM systems: an older Phenom ProX and a new PhenomXL G2 (acquired May 2021). Both SEMs have backscattered electron detectors (BSD) for imaging and energy-dispersive X-ray spectroscopy (EDS) systems for elemental identification. The new PhenomXL contains an additional secondary electron detector (SED), which gives the images it captures better depth of field.

Theory

Electron Imaging

Detectors

EDS